SEM & SIM Group


SEM/IOM technical group is engaged in surface characterization and analysis techniques with electron and ion probe to serve material researchers and engineers. The facilities include full sets of Focused Ion Beam System (FIB), Field Emission Gun Scanning Electron Microscopes (FEG-SEM) and Secondary Ion Mass Spectrometer (SIMS), equipped also with nano-manipulator, in-situ mechanical testers and composition analysis attachment. The facilities and equipment are used for high resolution morphological imaging with resolution down to sub-nano, microstructural characterization capable for grain size and orientation in nanoscale, fast and precise analysis for qualitative or quantitative composition. Electron Backscattering Diffraction system (EBSD) and high sensitive backscattering electron detector (BSD) in the SEMs allow researchers to examine the crystals distribution with their orientation and the grains distribution with channel contrast. The SIMS with time of flight (TOF) mass spectrometry offer unique capabilities in the investigation of elemental distribution in plane and depth, In addition to composition analysis of energy disperse spectrometry (EDS) with SEM, light and trace elements, isotopes, molecules can also be detected in SIMS. That makes SIMS a powerful tool to obtain full spectra of the composition and many organic compounds as well. Besides sampling at defined or specified site of interested, the FIB system is also dedicated to machining and milling in micro and nano scale.

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